| Resumen |
A solid solution of barium-strontium titanate BaxSr1-xTiO3 was deposited in thin films by RF reactive co-sputtering for x values within 0 ≤ x ≤ 1. The films composition was controlled through applied RF power to BaTiO3 and SrTiO3 targets. The Ba and Sr contents in thin films is characterized through x values as a function of applied RF power showing a good concordance, within the experimental error, with a kinetic description based on a molecular free path mean sputtering process. The elemental composition of the films was obtained considering the electron dispersion spectroscopy, and the x value inferred through the change of the (110) lattice inter-planar spacing. This one was obtained from the peak position in the x-ray diffraction (XRD) patterns by BSTO films. The average crystal size for the whole composition is around 20 nm, obtained from XRD data analysis.
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