| Resumen |
Thecombinedeffectonthevariationofthein-situ deposition temperature and the variation of the applied power on the deposition rate (DR), gap energy (Eg), and resistivity (ρ) in barium strontiumtitanatethinfilms,depositedintoRF(radiofrequency)–magnetron cosputtering equipment, are presented in this research. The simultaneous action of two magnetrons (BaTiO3 and SrTiO3) is explained using the first and second derivative of Boltzmann’s sigmoidal equation. This found that a deposition gradient is a very novel analysis. Using the color-code lines built through MATLAB® andanalyzingthetrendinformation,takingintoaccounttheinfluenceofthecalculated“x”parameter, bymeansoftheBoltzmann’ssigmoidalequationfit,weproposeamethodtosetupanRF–magnetron cosputtering system to predict the DR(x,T),Eg(x,T), and ρ(x,T) values of BaxSr1−xTiO3 solid solutions with 0≤x≤1 for amorphous and crystalline phases. This method can be a versatile tool to optimize the deposition process with, or without, in situ deposition temperature.
Keywords: BaxSr1−xTiO3 films; Boltzmann fitting; optical band gap; deposition rate; stoichiometric content; RF–magnetron; cosputtering
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